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The thermal evolution process of RuO 2 –Ta 2 O 5 /Ti coatings with varying noble metal content has been investigated under in situ conditions by thermogravimetry combined with mass spectrometry. The gel-like films prepared from alcoholic solutions of the precursor salts (RuCl 3 ·3H 2 O, TaCl 5 ) onto titanium metal support were heated in an atmosphere...
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