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Piezoelectrically actuated membranes in lanthanum gallium silicate (langasite) were fabricated. The membranes have shown operating temperatures up to 850 degC and are applied as high temperature gas detecting devices by means of CeO2 sensor films. The measurements show, that gas sensing with membranes is feasible and results in even higher frequency shifts as for thick plan-parallel resonators. A...
In order to acquire multiple information about highly damped resonant gas sensors, such as frequency shift and damping figure, a compact impedance analyzer interface with direct-sampling-technique (DST) has been developed. DST allows accurate signal detection, good noise rejection by digital signal processing and very short measurement periods. The compact impedance analyzer is well suited for process...
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