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In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching...
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