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A new group of thin film metallic glasses (TFMGs) have been reported to exhibit properties different from conventional crystalline metal films, though their bulk forms are already well-known for high strength and toughness, large elastic limits, and excellent corrosion and wear resistance because of their amorphous structure. In recent decades, bulk metallic glasses have gained a great deal of interest...
A multilayer Al/HfN/Si system, prepared by the reactive sputtering method, was subsequently annealed at various temperatures in order to find out whether the HfN intermediate layer could serve as a diffusion barrier between metal (aluminum) and semiconductor (silicon). The structure of the system before and after annealing was investigated using thin film X-ray diffraction (grazing incidence XRD)...
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