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In order to use the shape memory alloy Cu-Al-Ni in micro-actuators, freestanding thin films with martensitic transformation are required. Here we show that freestanding Cu-Al-Ni thin films with L21 structure, martensitic transformation and shape memory effect can be obtained using iron as a sacrificial layer. The Cu-Al-Ni films with best performance are obtained at deposition temperatures between...
We report the influence of the microstructure on the martensitic transformation in polycrystalline CuZnAl thin films with 18R structure. The films are grown in two steps. First, CuAl thin films are obtained by DC sputtering. Second, the Zn is introduced in the CuAl thin films by the annealing them together with a bulk CuZnAl reference. The crystalline structure of the films was analyzed by X-ray diffraction...
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