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This study introduces a new technique for depositing photocatalytic TiO2 thin layers on a nanodiamond (ND) abrasive to polish a single-crystal 6H-SiC wafer with sol-gel tools. A controllable and simple method is utilized to prepare ND/TiO2 composite abrasives by isothermal hydrolysis without conventional post-heating treatment for crystallization. The composites are characterized by X-ray diffraction...
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