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We have studied the decay kinetics of nanoscale multilayer holes on SrTiO 3 (001) surfaces, using variable temperature scanning tunneling microscopy. We have performed real time observation of the decay of multilayer holes with diameters of 10nm order at 750°C. We have found that the hole decays, filling layer by layer from the bottom while expanding the periphery of the hole. We have performed...
The dynamic behavior of steps involved in the relaxation of sharp corners in microfabricated structures on crystalline surfaces have been studied. We find that during the early stages of relaxation of slightly tapered trenches on Si(001), wide (110) terraces perpendicular to the substrate are formed near the corners of the trench sidewalls. The evolution of a step profile around the corner region,...
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