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A novel combination of ink-jet printing (IJP) and micro-transfer moulding (μ-TM) for high-resolution, heterogeneous material microstructuring is demonstrated. First, IJP is used to accurately fill the micro-cavities in an elastomeric mould, thus avoiding the use of spin coating or direct casting with a noticeable reduced material waste. Second, a μ-TM process is performed using the as-filled mould...
This paper describes a novel method to fabricate polymer MEMS based on the inkjet printing of SU-8, with a special emphasis on integrated micro-optical lens arrays. Inkjet control parameters are optimized in order to enable a stable and reproducible ejection of SU-8 drops in both continuous and drop-on-demand (DOD) modes. Arbitrary patterns of single and multiple polymer drops and arrays of convex...
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