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The possibilities of sub-micron patterning by means of microstencils using pulsed laser deposition were investigated. Stencils with circular and elliptical patterns were used, with pore sizes ranging from 1 μm down to 500 nm. Strontium titanate (SrTiO3), silicon (Si) and self-assembled monolayers on gold were used as substrate materials, whereas nickel (Ni), nickel oxide (NiO) and gold (Au) have been...
We have built and operated anovel setup for the characterization and identification of gases or vapors based on sequential position readout via abeam-deflection technique from amicrofabricated array of eight cantilever-type sensors. Each of the cantilevers can be coated on one side with adifferent sensor material to detect specific chemical interactions. We demonstrate that disturbances from vibrations...
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