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This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge,...
This paper reports a micromachined corona discharger with slit dielectric barrier for measuring the number concentration of airborne particle. The tip-to-plate corona discharger presented in our previous research only generates the corona discharge on the tip type electrode. However, the proposed corona discharger generates the corona discharge on the slit dielectric barrier as well as the tip type...
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