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Highly oriented VO 2 (B), V 6 O 13 , and V 2 O 5 thin films have been deposited on fused silica substrates by RF magnetron sputtering. X-ray diffraction characterization revealed that all the three films were single phases and strongly oriented with the (001) planes parallel to the substrates. The micro-Raman scattering spectra of the films were reported...
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