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Methyl-terminated Si(111) (Me-Si(111)) and bilayer-GaSe terminated Si (BGS) surfaces were investigated to explore their usefulness as the protection layer in the fabrication process of nanometer-scale self-assembled monolayers (SAMs). BGS was not stable in the reagent involved in the alkyl SAM formation, whereas Me-Si(111) was suitable for the protection layer. Anodization using atomic force microscope...
Nano-scale oxide patterns were fabricated on a bilayer-GaSe terminated Si(111) surface using an atomic force microscope (AFM) in air. The Si(111) surface regularly terminated by bilayer-GaSe is very stable in air, although it can be oxidized through the electrochemical reaction when positive sample bias voltage is applied between the surface and a conductive cantilever tip of AFM. It has been revealed...
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