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This paper investigates about characteristic measurement methods and experimental results for micro-capacitance and electro-acoustics of wafer level MEMS microphone. And this paper also studies packaging and measurement for the microphone product to verify yield of semi-finished products from the measurement methods to save cost of the production. The repeatability of the micro-capacitance measurement...
Many people nowadays suffer from various degrees of hearing impairment. Having an appropriate hearing aid system is a good solution to resolve their hearing problem. In this application, various noises interfere with the hearing aid system to result in degrading sound quality. In order to improve sound quality, the schemes to suppress and remove noises are investigated. Additionally, the sound localization...
In this paper, two different post CMOS fabrication process designs which were also novel differential hot wire anemometers (usually named it as flow sensors) similar to Honeywell flow sensor structure are presented. Additionally, other two new types of anemometer structure compatible with standard CMOS process were also demonstrated in this paper. Our fabrication strategy to the anemometer was based...
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