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The behavior of hydrogen in the plasma hydrogenated MgAl films on stainless steel membranes, in particular, the effect of surface and interface properties on the efficiency of hydrogenation and kinetics of hydrogen effusion were investigated. The paper aims at optimizing the processes of hydrogen retention and its thermal release on the basis of a model based on the “trapping” of hydrogen between...
Flux effects in ion nitrided AISI 304 stainless steel have been investigated in an attempt to understand the mechanism of nitrogen transport. It is concluded that an interaction between a highly activated surface layer, the internal interfaces and the bulk is critical. Under conditions of non-equilibrium present on the surface, the nitrogen atoms are driven into the grain boundaries and highly compressive...
The paper deals with the interpretation of the results obtained from the depth profile measurements based on sputter analytical techniques for samples that were previously subjected by ion bombardment. It is shown that the changes in the kinetics of surface composition observed at the initial stages of depth profiling may not correspond to the real composition distribution for the near-surface region,...
The reactive ion etching of GaAs (100) in CF 2 Cl 2 +O 2 plasma is reported. The RF plasma was excited in a diode asymmetrical system with accelerating potential of 300-1500 V, discharge power of 0.5-5.0 W\cm 2 and pressure of 10 -2 -10 Pa. The experimental measurements have shown that with the increase of discharge power in plasma the surface becomes depleted...
The ion beam assisted etching of silicon through a mask in a low pressure fluorocarbon plasma is considered. The two-dimensional profiles of etched grooves are calculated using a proposed model involving a function of mask size, the fluxes of incident chemically active and non-active species from the plasma and bombarding ions. The model also includes the processes of adsorption, heterogeneous reactions,...
The surface topography of multilayered W/Cu structures is studied after 100-340 keV Ne + and Ar + irradiation in the range of fluences up to 10 17 cm -2 employing the stylus method. The characteristic features on the surface are correlated with the experimental results obtained when measuring stress relaxation during ion irradiation by employing the bending...
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