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We have batch fabricated suspended nanochannel resonators (SNRs) to improve the mass resolution of suspended microchannel resonators (SMRs). The SNR consists of a cantilever that is 50 μm long, 10 μm wide, and 1.3 μm thick, with an embedded nanochannel that is 2 μm wide and 700 nm tall. The SNR has a resonance frequency near 640 kHz and exhibits the maximum quality factor of approximately 16,000 when...
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