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Diamond like carbon (DLC) coatings were deposited on silicon(111) substrates by microwave electron cyclotron resonance (ECR) plasma CVD process using a plasma of Ar and CH 4 gases under the influence of DC self bias generated on the substrates by application of RF (13.56MHz) power. DLC coatings were deposited under the varying influence of DC bias (−60V to −150V) on the Si substrates. Deposited...
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