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Al-rich Al x Cr 1−x N coatings have been deposited by reactive magnetron co-sputtering using a direct current (DC) power source to Al and a radio frequency (RF) power source to Cr target. The crystal structure, chemical composition, surface morphology, thickness and hardness of the Al x Cr 1−x N coatings which were prepared at various N 2 flow rates and working...
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