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Scanning electron microscopy (SEM) images show that 21 mum thick SU-8 pillars on silicon develop after proton beam writing (PBW). These data demonstrate a capability of PBW to fabricate vertical pillars with a height of 21.0 mum and a width of as small as 1.1 mum with a high aspect ratio of 20, and with a uniformity over 700 mum square area. An optical microscope image shows a part of a dielectrophoretic...
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