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This letter reports the application of ultra-high vacuum E-beam evaporated polysilicon (UHVEEPoly) film for lead zirconate titanate (PZT)-based piezoelectric micro-electro-mechanical systems (MEMSs) for the first time. The UHVEEPoly film is employed as a passive structural layer in unimorph piezoelectric cantilever micro-actuators to demonstrate its applicability in PZT-based MEMS. Two sets of PZT...
This paper advances the Intelligent Predetermined Control Method (IPCM) to improve the energy and water consumption and the performance of the test chamber. The IPCM is composed of scheduling the optimal control path, calculating the required heat and the mass of water vapor along the path, actuating the precise heater and humidifier to meet the chamber demands. To verify the feasibility of IPCM,...
The problem of the adaptive observer design for the diagnosis of actuator faults in deterministic systems is addressed. A general situation where the system is subjected to either model uncertainty or external disturbance is considered. The fault is diagnosed by an adaptive diagnostic observer, respectively. A new design algorithm to the adaptive diagnostic observer is proposed and the respective...
While electronic sensors and actuators have a long history of being used for a broad variety of industrial applications, these applications tend to be self-contained, for example, to control a process or to automate an operation. The recent technology advancements in ubiquitous connectivity and distributed computing have afforded improved business performance or novel business models by narrowing...
While the practice of service oriented architecture (SOA) and model-driven development (MDD) has brought efficiency gains to software development, building responsive, scalable business applications enabled by distributed sensor and actuator (S&A) infrastructure remains challenging, often involving extensive effort and skill. The results are typically one-of-a-kind, difficult to replicate or modify...
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