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In this study, the CNT growth by the RF-PECVD is sensitive to the granulation condition of catalyst film. It is expected that further precise control of the granulation of catalyst film enables further improvement of controllability of CNT growth that gives better FE characteristics.
In this paper, novel and simple fabrication method of CNT field emitter by means of direct growth of CNT onto tungsten tip by CVD was developed. This method enables a fabrication of a high-quality CNT field emitter with simpler procedures than conventional methods. Aluminum (Al), nickel (Ni) and molybdenum (Mo) films were sequentially deposited onto a W tip with tip radius of ~ 0.1 micrometer. Ni...
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