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This paper reports the fabrication and characterization results of a silicon micro mirror fabricated by integrated of top-down fabrication of CNTs thin film and conventional micromachining. The silicon mirror is suspended by CNT hinge and actuated by using electrostatic force through angular vertical comb system. The performance of the mirror had been characterized. Thanks to the excellent mechanical...
Regular reflectance measurements of a forest of vertically aligned single-walled carbon nanotubes were made as a function of an incident angle for the S- and P-polarized lights in the infrared region. The low reflectance measured at normal incidence, 0.0005-0.0009, supports a model of a low material density and also the incident angle dependence of reflectance spectra for the S- and P-polarized lights...
In this study, the CNT growth by the RF-PECVD is sensitive to the granulation condition of catalyst film. It is expected that further precise control of the granulation of catalyst film enables further improvement of controllability of CNT growth that gives better FE characteristics.
In this paper, newly developed high spatial resolution X-ray radiography system (HR-XRS) by modifying the compact SEM equipped with the MWCNT cathode former was reported. The X-ray images of the Cu 300 mesh were taken as a demonstration of the XRS. The resolution less than 1 mum was achieved. It is suggested that the MWCNT cathode is suitable one for the HR-XRS.
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