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This paper reports the comparison among the results obtained by various types of testing for evaluating fatigue lifetime of silicon specimens, performed in 6 institutions in Japan. The experiment covers a variety of single crystal silicon (SCS) specimens fabricated on the same SOI wafers with 5 μm device layer thickness as well as additional specimens made separately in some institutions. In summary,...
The fatigue life of micrometre-scale single-crystal silicon specimens was measured using the resonant vibration of a micromachined resonator device. Two kinds of identically shaped specimens oriented to ??110?? and ??100?? crystal directions on the (001) plane were tested. On the deflection-life relationship, the deflection amplitudes of the ??100?? oriented specimens were approximately 1.56 times...
This paper reports on a tensile-mode fatigue test in a constant humidity, even in a very high humidity, to reveal the mechanism of fatigue fractures of MEMS materials. A newly developed tensile-mode fatigue tester using the electrostatic grip can control the humidity from 25% RH to 90% RH. Using this tester, the fatigue life and strength of single crystal silicon (SCS) thin films and their dependence...
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