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This paper reports on a tensile-mode fatigue test in a constant humidity, even in a very high humidity, to reveal the mechanism of fatigue fractures of MEMS materials. A newly developed tensile-mode fatigue tester using the electrostatic grip can control the humidity from 25% RH to 90% RH. Using this tester, the fatigue life and strength of single crystal silicon (SCS) thin films and their dependence...
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