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Effective management of knowledge intensive yield analysis plays a significant role in fast yield ramping for semiconductor manufacturing. Although data analysis platforms with many analysis function tools are available to the industry, there is lack of systematic representation of engineering knowledge for effective extraction and sharing; engineers' identification of situations and analysis purposes...
A Bayesian Ranking Scheme is proposed for the reliable diagnosis of various yield-loss factors induced in semiconductor manufacturing. The aim is to cope with three problems: (FICV) false identification due to confounding variables, (FISV) false identification due to suppressor variables, and (MISC) miss identification due to severe multicollinearity. The proposed scheme reuses both the results from...
This paper studies the issues of designing a Bayesian framework for the reliable diagnosis of various yield-loss factors induced in semiconductor manufacturing. The proposed framework integrates both the results from knowledge-based and data-driven inference tools as input data, where the former resembles expert??s knowledge on diagnosing pre-known yield-loss factors while the latter serves for exploring...
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