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Polycrystalline thin films of La-substituted bismuth titanate (BLT) have been formed directly on p-type Si(100) substrates by using sol-gel and spin-coat methods. The BLT film and interfacial layer between BLT and Si were quantitatively investigated by X-ray reflectivity method. Also, crystal orientations of sub-100 nm-thick BLT thin films have been confirmed by X-ray diffraction using synchrotron...
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