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Raman spectroscopy and scanning electron microscopy, combined with the Vickers indentation method, were applied to analyze the fracture behavior of a thin (i.e., 1μm in thickness) aluminum nitride (AlN) film deposited on a (001)Si substrate. A series of indentations were introduced in the AlN/Si system with applying gradually increasing loads, and the stress intensity factor, K R , stored...
We performed polarized/confocal Raman microprobe measurements in order to visualize the effects of crystallographic orientation and anisotropic volume changes on the elastic stress field developed in single‐crystalline silicon upon impinging its surface with a pyramidal indenter. A theoretical analysis of multiaxial stress‐induced phonon scatter was applied and an improved equation proposed for rationalizing...
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