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AMHS (automated material handling system) vendors are being expected not only to offer transport capabilities but also to guarantee its contribution to entire fab productivities. One of essential techniques for realizing this is estimation with using simulation studies prior to installation of AMHS into a fab. However traditional framework of AMHS simulation cannot enable to estimate entire fab productivities...
When examining new configuration for manufacturing systems for 450 mm wafers, it is important to build logical models of whole or parts of fabs that include AMHS (automated material handling system), and then investigate behaviors of them. This paper presents a logical model of a part of a fab that includes production tools and AMHS. It shows CET (carrier exchange time) becomes more important for...
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