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Variable resistors were constructed from epitaxial SrRuO 3 (SRO), La 0.67 Sr 0.33 MnO 3 (LSMO) and SrTiO 3 layers with perovskite crystal structure. Each layer was patterned separately by lithographic methods. Optimized wet chemical etchants and several polishing steps in organic solvents allowed good epitaxy of subsequent layers, comparable to epitaxy on pristine...
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