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This paper reports on the design and characterization of a low phase noise MEMS oscillator with ultra-low polarization voltage. An innovative oscillation circuitry is also proposed by a high gain-bandwidth, low-power TIVA (trans-impedance voltage amplifier) which is composed of two stages: the I-to-V stage and voltage gain stage. The TIVA is fabricated using 1P6M 0.18 μm CMOS technology and has been...
A MEMS process scheme designed for multi- sensors is presented. This new process scheme includes a poly bump not only provides stiction prevention and gap control function, and also electrical connection between MEMS structure and routing lines. Another advantage for this scheme is a better vacuum level because all material can be high temperature annealed before final encapsulation. This study also...
A fin type silicon-based Pirani vacuum gauge and its measurement methodology are first introduced. It provides a wide pressure measurement range from 0.1 torr to 760 torr with device size less than 300 × 300μm2. This vacuum gauge can be monolithically integrated with motion sensors or resonators using the same fabrication processes, and thus further be exploited to monitor the cavity pressure where...
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