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The microstructure and electrical properties of in-situ annealed carbon films is studied in this paper. The structure of the films is studied by transmission electron microscopy, electron energy loss spectroscopy and Raman spectroscopy. The microstructure of the films strongly depends on the deposition temperature for the films deposited at high temperatures (higher than 400??C). However, at low temperatures...
Metal containing amorphous carbon (a-C:Me) films including a-C:Al, a-C:Ti, a-C:Ni, a-C:Si were prepared by the filtered cathodic vacuum arc (FCVA) technique with metal-carbon (5 at.% metal) composite targets. The substrate bias ranging from floating to 1000 V was applied. The wettability of the films was examined using the VCA Optima system from AST Products, Inc. Three types of liquid with different...
Currently, there is a strong drive to make micro-electro-mechanical system (MEMS) devices from higher performance materials such as diamond-like carbon or amorphous carbon (a-C) films, due to their excellent tribological properties, low-stiction (hydrophobic) surfaces, chemical inertness and high elastic modulus, compared to that of Si. The hydrogen free a-C films prepared, by Nanyang Technological...
An investigation has been carried out to study the effect of high substrate bias voltages on the morphological, mechanical, adhesive and tribological properties of diamond-like carbon (DLC) films. The morphological study shows that the film has a tendency to be rougher, when it is prepared with increased substrate bias voltages. Relatively lower hardness and poor wear resistance (the coefficient of...
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