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I developed a microelectromechanical system (MEMS) liquid cell for the visualization of bubbles and droplets at the microscale using a scanning electron microscope (SEM). The MEMS liquid cell has an electron transparent membrane and a microchannel. The electron transparent membrane was 80‐nm‐thick Si3N4. I tested the wettability of the electron transparent membrane and liquid leakage, and simulated...
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