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Chalcopyrite based solar-cell absorbers as Cu(In,Ga)(S,Se) 2 have to be covered by a buffer layer to increase cell efficiencies. We use ZnSe layers which are grown by halogen supported chemical vapour deposition. During the deposition the absorber is heated up to 350 o C. At these temperatures diffusion processes may occur. For direct verification we performed elastic recoil detection...
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