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We used atomic force microscopy to study the topographical changes induced on Si(111) surfaces by 10-22 keV Ar + bombardment. The irradiation was carried on normal to the surface with doses in the 1-60x10 16 ions/cm 2 range. We observed a first generation of blisters at a critical dose around 3x10 16 ions/cm 2 , which flakes off at 19x10 1 ...
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