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Micro-fabricated biocompatible check valves are integral parts of many implantable micro-fluidic devices. The cracking pressure of check valves is usually controlled by stiction between polymeric films and the underlying substrate. The following paper presents the first comprehensive study of stiction between parylene and silicon surfaces. The valves are fabricated using surface micromachining with...
This paper presents a preliminary study into stiction between parylene C and substrate surfaces for biocompatible check-valve applications. During fabrication, parylene C is used as the structural material for the check-valve. The substrate surfaces studied include Au, Al, Si, parylene C, XeF2 treated Si, and silicon dioxide. Stiction between different surfaces is created after sacrificial photoresist...
MEMS check valves with fixed cracking pressures are important in micro-fluidic applications where the pressure, flow directions and flow rates all need to be carefully controlled. This work presents a new surface-micromachined parylene check valve that uses residual thermal stress in the parylene to control its cracking pressure. The new check valve uses slanted tethers to allow the parylene tensile...
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