The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Many micro-electro-mechanical structures are always subject to residual stress and can easily cause mechanical deformation. The warpage of device substrate could directly affect the performance and should be effectively controlled. This paper mainly reports a novel concept of out-of-plane micro-force function generator for micro-deformation modifying. The proposed generator is based on batch fabricated...
To improve the performance of MEMS device, it is critical that the effect of environmental parameters on these devices be controlled or eliminated. In this paper, we first developed a novel technique by employing thermal actuator and actuators array to rectify the micro deformation of MEMS substrate due to thermal mechanical stress as a result of temperature variation. This PTAA consisting of a 50...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.