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We have demonstrated that a thick polymer cover layer can significantly improve UV laser micromachining. The polymer cover layer acts as a wave-guide, concentrating the incoming laser beam onto the underlying substrate to be machined. With this method very low laser fluences can be used to drill fine, high aspect ratio holes in quartz, glass and other materials that are generally difficult to machine...
Plumes generated by ablation of polymer targets using a third-harmonic Nd:YAG laser under different atmospheres (air, N2 and He) were deposited on a H-terminated silicon substrate. The chemical composition and distribution of deposited ablation debris were measured using time-of-flight secondary-ion mass spectrometry. Mass-resolved images show that the size and shape of the plume is dependent on the...
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