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This paper reports a high performance capacitive accelerometer with a noise level of 350ng/√Hz, bandwidth of 4.5kHz, and 135 dB open loop dynamic range at 1Hz bandwidth. The accelerometer was designed in a mode-tuning structural platform. This platform is developed to address the issue between sensitivity and bandwidth for the low-noise capacitive in-plane accelerometers. The platform proposes to...
High performance accelerometers have wide variety of applications in inertial navigation, seismic imaging, and conditional health monitoring. This paper reports mechanical design, fabrication, and characterization of an in-plane MEMS accelerometer. The sensor has been designed in such a way to meet both the high sensitivity and the wide bandwidth requirements in one single device. The MEMS sensor,...
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