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The paper deals with investigation of Mo oxide and mixed W/Mo oxide films showing high electrochromic performance. Films are deposited on Si and conductive glass substrates using pyrolytical decomposition at 200 °C of Mo and W hexacarbonyls in Ar/O 2 atmosphere. The study is focused on structural transformation of the films in dependence on deposition and annealing process parameters. In case...
Thin films of molybdenum, tungsten and mixed MoO 3 -WO 3 oxides obtained by atmospheric pressure chemical vapor deposition (APCVD) are investigated by applying Raman and XRD measurements. All the films were prepared by identical technological parameters and were annealed at 400 °C. Analysis of the Raman and XRD spectra of the three types of films shows that molybdenum oxide films crystallize...
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