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The structural, surfacial and nanoscale mechanical properties evolution of Ti–Ni–Cu thin films, prepared by the co-sputtering of TiNi and Cu targets during rapid thermal annealing (RTA) were investigated. Crystallization took place in a few seconds at 480°C. With increasing annealing time (up to 180s), roughness increased dramatically, and was far more prominent than in films crystallized by conventional...
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