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The crystallization of Ni-rich/NiTiCu bi-layer thin film deposited by magnetron sputtering from two separate alloy targets was investigated. To achieve the shape memory effect, the NiTi thin films deposited at room temperature with amorphous structure were annealed at 773K for 15, 30, and 60min for crystallization. Characterization of the films was carried out by differential scanning calorimetry...
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