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Microcrystalline silicon (/spl mu/c-Si:H) thin-film solar cells are prepared with intrinsic Si-layer by hot wire CVD. The operating parameters of solar cells are strongly affected by the filament temperature (T/sub f/) during intrinsic layer. J/sub sc/ and efficiency abruptly decreases with elevated T/sub f/ to 1400/spl deg/C. This deterioration of solar cell parameters are resulted from increase...
Thin films of niobium nitride (NbN) were deposited on SKD11 tool steel substrate by a dc magnetron sputtering system. The influence of the N/sub 2//Ar gas ratio of the inlet gases, the deposition temperature, the substrate bias potential on the mechanical and structural properties of the films were investigated. The X-ray diffraction data showed NbN deposited at room temperature has cubic structures...
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