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Comb structures are widely used in MEMS (Micro-Electro-Mechanical-System) devices, especially in MEMS gyroscope, which is used for electrostatic actuation or capacitive detection. This paper has studied the behavior of non-ideal comb structures. As the presence of fabrication imperfections, the defects like tilting and inclination of the finger are generated due to ICP etching. In this research, FEM...
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