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The microstructure of α-Al 2 O 3 implanted with iron at energy of 50keV to a dose of 1×10 17 ions/cm 2 at room temperature has been studied. The iron concentration profile shows a well-defined peak at ~50nm from the surface, in agreement with the calculated value. The implanted Fe ions precipitate as the α-Fe particles during annealing in a reducing atmosphere. The...
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