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A lithographic scheme is reported that uses a cholesteric liquid crystal with its helical axis in the plane of the sample as a “mask” for imprinting patterns in a photoresist over a large area. On the application of an electric field the cholesteric liquid crystals produce a texture that acts as a lattice of cylindrical lenses for one polarization of a light beam. This is used in photolithography...
A photomask that combines two imaging elements (microlens arrays and clear windows) in one structure has been developed by using toric focal conic domain (TFCD) micro arrays of smectic liquid crystals. Their application as optically selective photomasks by simply adjusting (i) the illumination dose, (ii) the size of TFCD array mask, and (iii) the tone of photoresist (PR) is demonstrated (see figure)...
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