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Dynamic thermal degradation of amorphous carbon nitride (a-CN x ) thin films was studied in N 2 and air. The films were magnetron-sputtered at two different pressures to yield various C–C and C–N ratios. Typically, the films consist of interstitial and weakly-bonded carbon–nitrogen molecules or clusters and nitrogen-substituted graphitic-carbons. The carbon and nitrogen atoms are mainly...
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