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We have studied the capability of a new method for 3D XPS imaging and have focused on the influence of noise in the spectra. To this end, we have studied a patterned structure made by thermally oxidising a silicon wafer. We have studied the O 1s, Si 2p and C 1s peaks which have rather low photoionization cross sections. In addition we have not used high spectrometer pass energy. Therefore, the signal-to-noise...
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