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Cu2ZnSnSe4 (CZTSe) thin films were deposited by RF-magnetron sputtering using a single quaternary CZTSe target. After the deposition, CZTSe thin films were annealed under different temperature ranging from 300°C to 550°C with a space of 50°C. After annealing treatment, the grain size of CZTSe thin films became bigger. XRD results showed that thin films were kesterite-type CZTSe with a preferential...
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