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This paper presents a practical tone reproduction approach to taking videos in high dynamic range scenes. The algorithm boosts the visibility of darker regions by attenuating the dynamic range of the low frequency plane and simultaneously enhances the image details. The successive frames share the same set of tone curves for the execution time reduction. The experimental results show that the algorithm...
This paper proposes the schemes of automatic process and metrology data-quality evaluations for the automatic virtual metrology (AVM) system. Firstly, principal component analysis is applied to extract data features of all the collected equipment process data; then Euclidean distance is utilized to unify all the principal components into a single index denoted by process data quality index ...
In current semiconductor and TFT-LCD factories, periodic sampling is commonly adopted to monitor the stability of manufacturing processes and the quality of products (or workpieces). As for those non-sampled workpieces, their quality is usually monitored by such as a fault-detection-and-classification (FDC) server. However, this method may fail to detect defected products. For example, a workpiece...
An automatic virtual metrology (AVM) system that consists of a model-creation server and many AVM servers is proposed. The model-creation server will generate the first set of data quality evaluation models and virtual metrology (VM) conjecture models of a certain equipment type. Under fab-wide VM deployment, the model-creation server can also fan out the first set of models generated to all the AVM...
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