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Transparent and conducting ITO/Au/ITO multilayered films were deposited without intentional substrate heating on polycarbonate (PC) substrate using a magnetron sputtering process. The thickness of ITO, Au and ITO metal films in the multilayered structure was constant at 50, 10 and 40nm, respectively.Although the substrate temperature was kept constant at 70°C, ITO/Au/ITO films were polycrystalline...
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