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This paper demonstrates a promising and low-cost method for fabricating PZT nano-dot array by using sol–gel template method combined with laser interference lithography. ZrO2 template with the pitch of 1 μm is firstly fabricated by sol–gel method and laser interference with a 325 nm He-Cd laser. Afterwards, PZT nano dot array with diameter of 500 nm and thickness of 20 nm is prepared on the ZrO2 template...
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